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344It is an energy efficiency model based on synchronous demodulation can be used to estimate achievable temperature sensing resolution Noise somehow can be reduced easily Design and implementation Wien Bridge circuitry can be driven by complementary square wave instead of sine waves to reduce energy consumption To digitize the output of WB s current a continuous time PHASE DOMAIN DELTA SIGMA MODULATOR is used which will also responsible for high resolution PCD SM Packaging and Challenges Plastic packaging is preferred due to low cost as compared to the ceramic packaging Mechanical stress affects the sensor s accuracy but due to metal like properties it exhibits stress sensitivity of silicided poly resistor as compared to that of non silicided poly resistor The maximum accuracy it can achieve is about or 2 deg C Conclusion As compared to other sensors the s p poly sensor it can achieve energy efficiency of 0 13pJ K 2 which might be 5 times better than the state of the art of CMOS SENSORS It can achieve an inaccuracy of or 3deg C when it will be packaged in ceramic packaging It s in accuracy can be comparable to BJT based sensors Based on WB RC filter a resistor based smart sensor can be implemented in a standard 0 18uM CMOS technology for the temperature compensation of MEMS quartz frequency references whose output phase can be digitized using continuous time PHASE DOMAIN DELTA SIGMA MODULATOR
Due to high temperature coefficient and low noise of silicided poly resistor the sensor can achieve up to 400uk resolution in a 5ms conversion time and a resolution figure of merit of 0 13 pJK 2 Acknowledgement I would like to thank Dr Ramesh Vaddi and P hd Scholar Mr Aditya Japa for their valuable assistance and support in reviewing this topic References 2 M H Perrott et al A temperature to digital converter for a MEMSbased programmable oscillator with 0 5 ppm frequency stability and 1 ps integrated jitter IEEE J Solid State Circuits vol 48 no 1 pp 276 291 Jan 2013 1 M Shahmohammadi K Souri and K A A Makinwa A resistor based temperature sensor for MEMS frequency references in Proc ESSCIRC Sep 2013 pp 225 228 2 P Park D Ruffieux and K A A Makinwa A thermistor based temperature sensor for a real time clock with 2 ppm frequency stability IEEE J Solid State Circuits vol 50 no 7 pp 1571 1580 Jul 2015 Resistor Based Temperature Sensor With 4 a 0 13 pJ K2 Resolution FoM
